Measurements of the Ion Species of Cathodic Arc Plasma in an Axial Magnetic Field
نویسندگان
چکیده
منابع مشابه
Plasma-based ion implantation utilising a cathodic arc plasma
Plasma-based ion implantation (PBII) is usually carried out with isotropic gaseous plasmas, such as a discharge in nitrogen. More recently, it has been applied using drifting plasmas, such as those produced by cathodic arcs, in order to allow efficient implantation of metallic species. The condensable nature of a cathodic arc plasma allows for the deposition of ion-stitched thin film coatings, ...
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چکیده ندارد.
15 صفحه اولImaging the separation of cathodic arc plasma and macroparticles in curved magnetic filters
Cathodic vacuum arc plasmas can be used to produce well adherent, dense, highquality films and coatings provided macroparticles are removed from the plasma. Both plasma and macroparticles are produced at cathode spots, and in most cases both can easily be observed because they emit light. The nature of this light emission is briefly discussed. Using open, curved solenoids as magnetic filters, o...
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ژورنال
عنوان ژورنال: IEEE Transactions on Plasma Science
سال: 2011
ISSN: 0093-3813,1939-9375
DOI: 10.1109/tps.2011.2106518